Chen Mei Ma

• Research and Design work in modeling and optimization product.
• Fabrication process engineer in MicroElectroMechanical System domain.
• Investigation and development of smart device on micro fabrication technology.

• Jan.98 ~ Mar.00 School of MPE, Nanyang Technological University, Singapore. Majoring in MicroElectroMechanical System


• Sept.93 ~ July.97 School of Energy and Power Engineering,  Xi'an Jiaotong University, China, BE

• Finite element analysis on mechanical, thermal and fluid by using ANSYS^®.
• Mask drawing by using L-edit
• Hand on experience on MEMS fabrication process 

  • Photolithograhy and development

  • PVD(sputtering & evaporation), CVD(LPCVD, PECVD)

  • Dry etch (RIE & DRIE), Wet etch 

  • Wafer bonding

• Microsystem design & assembling(Micro-PCR, Microfluidic& Microactuator) .
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• Stamp collection, travelling, drawing






• Available upon request
  






• Post adress:    Mirco Machines Lab, School of MPE
                              Nanyang Technological University
                              Singapore    639798
• E-mail:               mm-chen@imre.a-star.edu.sg

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Updated 28/02/2003